T-shaped microcantilever sensor with reduced deflection offset


AU: 
Plaza, J.A.; Zinoviev, K.; Villanueva, G.; Alvarez, M.; Tamayo, J.; Dominguez, C.; Lechuga, L.M.
SO: 
APPLIED PHYSICS LETTERS
Autores del GTQ: 
VL: 
89
IS: 
9
PY: 
2006
SN: 
0003-6951
Impact: 
3.98
Año IF: 
2006
Resumen: 

The authors have designed and fabricated arrays of microcantilevers with a geometry that shows reduced initial angular offset and angle deviation between the cantilevers of the array. This feature allows to detect the displacement of the cantilevers using

DT: 
Article en revistes indexades
Percentil: 
HIGH
Año Percentil: 
2006
Categoría: 
PHYSICS, APPLIED