A self-resonant frequency-modulated micromachined passive pressure transensor
AU:
Baldi, A.; Choi, W.; Ziaie, B.
SO:
IEEE SENSORS JOURNAL
Autores del GTQ:
VL:
3
IS:
6
BP:
728
EP:
733
PY:
2003
SN:
1530-437X
Resumen:
In this paper, we report on the design, fabrication, and test of a passive pressure transensor. The sensor uses the self-resonant frequency modulation of an integrated coil to detect the pressure variations. This modulation is generated by the relative di
DT:
Proceeding paper
