A self-resonant frequency-modulated micromachined passive pressure transensor


AU: 
Baldi, A.; Choi, W.; Ziaie, B.
SO: 
IEEE SENSORS JOURNAL
Autores del GTQ: 
VL: 
3
IS: 
6
BP: 
728
EP: 
733
PY: 
2003
SN: 
1530-437X
Resumen: 

In this paper, we report on the design, fabrication, and test of a passive pressure transensor. The sensor uses the self-resonant frequency modulation of an integrated coil to detect the pressure variations. This modulation is generated by the relative di

DT: 
Proceeding paper