Optical characterization of silicon rich oxide films


AU: 
Morales-Sanchez, A.; Barreto, J.; Dominguez, C.; Aceves-Mijares, A.; Luna-Lopez, J.A.
SO: 
SENSORS AND ACTUATORS A-PHYSICAL
Autores del GTQ: 
VL: 
142
IS: 
1
BP: 
12
EP: 
18
PY: 
2008
SN: 
0924-4247
Impact: 
1.72
Año IF: 
2008
Resumen: 

Silicon rich oxide (SRO) films with different silicon excess were deposited by low pressure chemical vapor deposition (LPCVD) using SiH4 and N2O as the reactant gasses. A set of SRO films was implanted with silicon ions (SI-SRO). After thermal annealing,

DT: 
Article en revistes indexades
Percentil: 
MEDIUM
Año Percentil: 
2008
Categoría: 
ENGINEERING, ELECTRICAL & ELECTRONIC