High-quality factor electrolyte insulator silicon capacitor for wireless chemical sensing


AU: 
Garcia-Canton, J.; Merlos, A.; Baldi, A.
SO: 
IEEE ELECTRON DEVICE LETTERS
Autores del GTQ: 
VL: 
28
IS: 
1
BP: 
27
EP: 
29
PY: 
2007
SN: 
0741-3106
Impact: 
2.49
Año IF: 
2007
Resumen: 

This letter reports on the design, fabrication, and characterization of a high Q electrolyte insulator silicon (EIS) capacitive structure and its application to LC wireless chemical sensors. LC sensors are based on the variation of inductance or capacitan

DT: 
Article en revistes indexades
Percentil: 
HIGH
Año Percentil: 
2007
Categoría: 
ENGINEERING, ELECTRICAL & ELECTRONIC