A self-resonant frequency-modulated micromachined passive pressure transensor

AU:

Baldi, A.; Choi, W.; Ziaie, B.

SO:

IEEE SENSORS JOURNAL

Autores del GTQ:

Antoni Baldi Coll [1]

DOI:

http://dx.doi.org/10.1109/JSEN.2003.820362 [2]

VL:

IS:

BP:

728

EP:

733

PY:

2003

SN:

1530-437X

Resumen:

In this paper, we report on the design, fabrication, and test of a passive pressure transensor. The sensor uses the self-resonant frequency modulation of an integrated coil to detect the pressure variations. This modulation is generated by the relative di

DT:

Proceeding paper