A self-resonant frequency-modulated micromachined passive pressure transensor

AU: 
Baldi, A.; Choi, W.; Ziaie, B.
SO: 
IEEE SENSORS JOURNAL
Autores del GTQ: 
Antoni Baldi Coll [1]
DOI: 
http://dx.doi.org/10.1109/JSEN.2003.820362 [2]
VL: 
3
IS: 
6
BP: 
728
EP: 
733
PY: 
2003
SN: 
1530-437X
Resumen: 

In this paper, we report on the design, fabrication, and test of a passive pressure transensor. The sensor uses the self-resonant frequency modulation of an integrated coil to detect the pressure variations. This modulation is generated by the relative di

DT: 
Proceeding paper
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URL de origen: http://gtq.imb-cnm.csic.es/es/publicaciones/articulos/self-resonant-frequency-modulated-micromachined-passive-pressure-transensor

Links
[1] http://gtq.imb-cnm.csic.es/es/equipo/antoni-baldi-coll
[2] http://dx.doi.org/10.1109/JSEN.2003.820362