Technological aspects on the fabrication of silicon-based optical accelerometer with ARROW structures


AU: 
Llobera, A.; Plaza, J.A.; Salinas, I.; Berganzo, J.; Garcia, J.; Esteve, J.; Dominguez, C.
SO: 
SENSORS AND ACTUATORS A-PHYSICAL
GTQ Authors: 
VL: 
110
IS: 
01/03/11
BP: 
395
EP: 
400
PY: 
2004
SN: 
0924-4247
Impact: 
1.46
Year IF: 
2004
Abstract: 

The fabrication and characterization of an optical accelerometer based on silicon technology and using BESOI wafers is presented. Instead of the standard total internal reflection (TIR) waveguides, AntiResonant Reflecting Optical Waveguides (ARROW) have b

DT: 
Article en revistes indexades
Percentil: 
HIGH
Percentil Year: 
2004
Category: 
ENGINEERING, ELECTRICAL & ELECTRONIC