Precipitation of highly luminescent phases from PECVD Si suboxides


AU: 
Peralvarez, M.; Lopez, M.; Garrido, B.; Morante, J.R.; Barreto, J.; Cadarso, V.J.; Riera, M.; Zinoviev, K.; Dominguez, C.
SO: 
Group-IV Semiconductor Nanostructures MATERIAL RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS
GTQ Authors: 
VL: 
832
BP: 
153
EP: 
158
PY: 
2005
SN: 
0272-9172
Abstract: 

Si nanoclusters (Si-nc) embedded in SiO2 present outstanding luminescent emission in the visible and are the material of choice for the realization of efficient light sources integrated with Si technology. PECVD is an attractive preparation route but ther

DT: 
Proceeding paper