Novel cantilever design with high control of the mechanical performance


AU: 
Plaza, J.A.; Zinoviev, K.; Villanueva, G.; Dominguez, C.
SO: 
MICROELECTRONIC ENGINEERING
GTQ Authors: 
VL: 
84
IS: 
05/08/11
BP: 
1292
EP: 
1295
PY: 
2007
SN: 
0167-9317
Impact: 
1.50
Year IF: 
2007
Abstract: 

A novel mechanical structure design with reduced deflection offset is reported. This design offers a batch processing solution to a well-known problem in the fabrication of very thin crystalline silicon structures, that is initial bending due to anchoring

DT: 
Article en revistes indexades
Percentil: 
HIGH
Percentil Year: 
2007
Category: 
ENGINEERING, ELECTRICAL & ELECTRONIC