Microelectromechanical resonators based on an all polymer/carbon nanotube composite structural material


AU: 
Sousa, PM; Gutierrez, M; Mendoza, E; Llobera, A; Chu, V; Conde, JP
SO: 
APPLIED PHYSICS LETTERS
GTQ Authors: 
VL: 
99
IS: 
4
BP: 
044104
PY: 
2011
SN: 
0003-6951
Impact: 
3.84
Year IF: 
2010
Abstract: 

Carboxylated multi-wall carbon-nanotubes (CNTs) monolayers are integrated on microfabricated all-polymer micro-electromechanical systems (pMEMS) resonator bridges on glass substrates. The structural layer of the MEMS bridges is a multilayer blended conductive polymer based on poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) to which functionalized CNT monolayers are electrostatically attached. The resonance frequency (f(res)) of electrostatically actuated pMEMS bridges was measured as a function of their length (32-67 mu m) for different multilayer compositions. A significant increase in f(res) and quality factor (Q) with the addition of CNT monolayers to the PEDOT:PSS structural material is observed, demonstrating that CNT monolayers can be used to modulate pMEMS resonator properties.

DT: 
Article en revistes indexades
Percentil: 
HIGH
Percentil Year: 
2010
Category: 
PHYSICS, APPLIED