Integrated micro- and nano-optical biosensor Silicon devices CMOS compatible
AU:
Lechuga, L.M.; Sepulveda, B.; del Rio, J.S.; Blanco, F.; Calle, A.; Dominguez, C.
SO:
Optoelectronic Integration on Silicon PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)
GTQ Authors:
VL:
5357
BP:
96
EP:
110
PY:
2004
SN:
0277-786X
Abstract:
We show the design, fabrication and testing of micro/nanobiosensor devices based on optical waveguides in a highly sensitive interferometric configuration and by using evanescent wave detection. The devices are fabricated by standard Silicon CMOS microele
DT:
Proceeding paper
