Integrated micro- and nano-optical biosensor Silicon devices CMOS compatible


AU: 
Lechuga, L.M.; Sepulveda, B.; del Rio, J.S.; Blanco, F.; Calle, A.; Dominguez, C.
SO: 
Optoelectronic Integration on Silicon PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)
GTQ Authors: 
VL: 
5357
BP: 
96
EP: 
110
PY: 
2004
SN: 
0277-786X
Abstract: 

We show the design, fabrication and testing of micro/nanobiosensor devices based on optical waveguides in a highly sensitive interferometric configuration and by using evanescent wave detection. The devices are fabricated by standard Silicon CMOS microele

DT: 
Proceeding paper