High-resolution photometric optical monitoring for thin-film deposition
AU:
Rabady, R.; Zinoviev, K.; Avrutsky, I.
SO:
APPLIED OPTICS
VL:
43
IS:
1
BP:
143
EP:
148
PY:
2004
SN:
0003-6935
Impact:
1.79
Year IF:
2004
Abstract:
Real-time monitoring of thin-film deposition with high resolution is important for precise fabrication of thin-film devices in a technological environment with ever-increasing demands for smaller size and better performance. Using photometry, we were able
DT:
Article en revistes indexades
Percentil:
HIGH
Percentil Year:
2004
Category:
OPTICS
