Fabrication and modeling of silicon-embedded high Q inductors


AU: 
Pan, T.R.; Baldi, A.; Davies-Venn, E.; Drayton, R.F.; Ziaie, B.
SO: 
Mems 2004: 17th Ieee International Conference on Micro Electro Mechanical Systems, Technical Digest
GTQ Authors: 
BP: 
809
EP: 
812
PY: 
2004
SN: 
1084-6999
Abstract: 

In this paper, we report on the fabrication and modeling of a CMOS-compatible silicon-embedded high-performance integrated inductor (muH range) with a Q-factor of over 60 and a self-resonant frequency of greater than 150 MHz. The fabrication process is ba

DT: 
Proceeding paper