Diffraction grating couplers milled in Si3N4 rib waveguides with a focused ion beam


AU: 
Zinoviev, K.; Dominguez, C.
SO: 
OPTICS EXPRESS
GTQ Authors: 
VL: 
13
IS: 
21
BP: 
8618
EP: 
8624
PY: 
2005
SN: 
1094-4087
Impact: 
3.76
Year IF: 
2005
Abstract: 

Focused ion beam milling is a processing technology which allows flexible direct writing of nanometer scale features efficiently substituting electron beam lithography. No mask need results in ability for patterns writing even on fragile micromechanical d

DT: 
Article en revistes indexades
Percentil: 
HIGH
Percentil Year: 
2005
Category: 
OPTICS