Development of characterization methods for micromachined embedded test structures


AU: 
Davies-Venn, E.; Pan, T.; Baldi, A.; Drayton, R.F.; Ziaie, B.
SO: 
2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, Digest of Papers
GTQ Authors: 
BP: 
318
EP: 
321
PY: 
2004
Abstract: 

Methods of characterizing low, frequency embedded passives on silicon substrates are suggested. Durioid fixtures and on-wafer methods are discussed for extracting Q factor of embedded coils on high and low resistivity silicon. Feedline, designs are discus

DT: 
Proceeding paper