Cantilever-Based Poly(dimethylsiloxane) Microoptoelectromechanical Systems


AU: 
Cadarso, VJ.; Plaza, JA; Zinoviev, K; Dominguez, C.; de Pedro, S.; Buttgenbach, S.; Llobera, A.
SO: 
2009 IEEE SENSORS. 8th IEEE Conference on Sensors, OCT 25-28, 2009 Christchurch, NEW ZEALAND
GTQ Authors: 
VL: 
01/03/11
BP: 
394
EP: 
398
PY: 
2009
SN: 
978-1-4244-4548-6
Abstract: 

Poly(dimethylsiloxane) (PDMS) has been considered for the first time for defining cantilever-based Microoptoelectromechanical Systems (MOEMS) by ways of soft lithography. The systems shown have a high degree of integration, comprising cantilever-waveguide

DT: 
Proceeding paper