Analysis of surface roughness and its relationship with photoluminescence properties of silicon-rich oxide films
AU:
Luna-Lopez, J.A.; Morales-Sanchez, A.; Aceves-Mijares, M.; Yu, Z.; Dominguez, C.
SO:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
GTQ Authors:
VL:
27
IS:
1
BP:
57
EP:
62
PY:
2009
SN:
0734-2101
Impact:
1.17
Year IF:
2008
Abstract:
It is well known that silicon-rich oxide (SRO) shows intense photoluminescence (PL). In this work, the authors studied the relationship of the surface morphology and the PL emission. PL spectra of SRO as a function of the excess silicon, temperature, and
DT:
Article en revistes indexades
Percentil:
LOW
Percentil Year:
2008
Category:
PHYSICS, APPLIED