Optical characterization of silicon rich oxide films

AU: 
Morales-Sanchez, A.; Barreto, J.; Dominguez, C.; Aceves-Mijares, A.; Luna-Lopez, J.A.
SO: 
SENSORS AND ACTUATORS A-PHYSICAL
GTQ Authors: 
Carlos Domínguez Horna [1]
DOI: 
http://dx.doi.org/10.1016/j.sna.2007.03.008 [2]
VL: 
142
IS: 
1
BP: 
12
EP: 
18
PY: 
2008
SN: 
0924-4247
Impact: 
1.72
Year IF: 
2008
Abstract: 

Silicon rich oxide (SRO) films with different silicon excess were deposited by low pressure chemical vapor deposition (LPCVD) using SiH4 and N2O as the reactant gasses. A set of SRO films was implanted with silicon ions (SI-SRO). After thermal annealing,

DT: 
Article en revistes indexades
Percentil: 
MEDIUM
Percentil Year: 
2008
Category: 
ENGINEERING, ELECTRICAL & ELECTRONIC
Share page with AddThis
Source URL: http://gtq.imb-cnm.csic.es/en/publicaciones/articulos/optical-characterization-silicon-rich-oxide-films

Links
[1] http://gtq.imb-cnm.csic.es/en/equipo/carlos-dominguez-horna
[2] http://dx.doi.org/10.1016/j.sna.2007.03.008