Optical characterization of silicon rich oxide films
AU:
Morales-Sanchez, A.; Barreto, J.; Dominguez, C.; Aceves-Mijares, A.; Luna-Lopez, J.A.
SO:
SENSORS AND ACTUATORS A-PHYSICAL
Autors del GTQ:
VL:
142
IS:
1
BP:
12
EP:
18
PY:
2008
SN:
0924-4247
Impact:
1.72
Any IF:
2008
Resum:
Silicon rich oxide (SRO) films with different silicon excess were deposited by low pressure chemical vapor deposition (LPCVD) using SiH4 and N2O as the reactant gasses. A set of SRO films was implanted with silicon ions (SI-SRO). After thermal annealing,
DT:
Article en revistes indexades
Percentil:
MEDIUM
Any Percentil:
2008
Categoria:
ENGINEERING, ELECTRICAL & ELECTRONIC
