High-resolution photometric optical monitoring for thin-film deposition


AU: 
Rabady, R.; Zinoviev, K.; Avrutsky, I.
SO: 
APPLIED OPTICS
VL: 
43
IS: 
1
BP: 
143
EP: 
148
PY: 
2004
SN: 
0003-6935
Impact: 
1.79
Any IF: 
2004
Resum: 

Real-time monitoring of thin-film deposition with high resolution is important for precise fabrication of thin-film devices in a technological environment with ever-increasing demands for smaller size and better performance. Using photometry, we were able

DT: 
Article en revistes indexades
Percentil: 
HIGH
Any Percentil: 
2004
Categoria: 
OPTICS