High-quality factor electrolyte insulator silicon capacitor for wireless chemical sensing
AU:
Garcia-Canton, J.; Merlos, A.; Baldi, A.
SO:
IEEE ELECTRON DEVICE LETTERS
Autors del GTQ:
VL:
28
IS:
1
BP:
27
EP:
29
PY:
2007
SN:
0741-3106
Impact:
2.49
Any IF:
2007
Resum:
This letter reports on the design, fabrication, and characterization of a high Q electrolyte insulator silicon (EIS) capacitive structure and its application to LC wireless chemical sensors. LC sensors are based on the variation of inductance or capacitan
DT:
Article en revistes indexades
Percentil:
HIGH
Any Percentil:
2007
Categoria:
ENGINEERING, ELECTRICAL & ELECTRONIC
