Fabrication of gas amplification microstructures with SU8 photosensitive epoxy


AU: 
Key, M.J.; Llobera, A.; Lozano, M.; Ramos-Lerate, I.; Seidemann, V.
SO: 
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
VL: 
525
IS: 
01/02/11
BP: 
49
EP: 
52
PY: 
2004
SN: 
0168-9002
Impact: 
1.35
Any IF: 
2004
Resum: 

Recent advances in the field of microelectromechanical systems (MEMS) research can be applied to the fabrication of gaseous electron-multiplying microstructures for use in imaging radiation sensors, and show interesting possibilities in addressing problem

DT: 
Article en revistes indexades
Percentil: 
HIGH
Any Percentil: 
2004
Categoria: 
INSTRUMENTS & INSTRUMENTATION