BESOI-based integrated optical silicon accelerometer


AU: 
Plaza, J.A.; Llobera, A.; Dominguez, C.; Esteve, J.; Salinas, I.; Garcia, J.; Berganzo, J.
SO: 
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Autors del GTQ: 
VL: 
13
IS: 
2
BP: 
355
EP: 
364
PY: 
2004
SN: 
1057-7157
Impact: 
2.88
Any IF: 
2004
Resum: 

The design, simulation, fabrication and characterization of a new integrated optical accelerometer is presented in this paper. The reduction of fabrication, packaging and thermo-mechanical stresses are considered by keeping the weak mechanical parts free

DT: 
Article en revistes indexades
Percentil: 
HIGH
Any Percentil: 
2004
Categoria: 
ENGINEERING, ELECTRICAL & ELECTRONIC